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Design and modelling of optical microsystems

Author(s): J.-P. Fibers, C. Glingener, E. Voges, P. Schreiber, C. Wachter, W. Karthe, D. Krabe, R. Dumcke, H. Reichl, G. Hagner, S. Schroter, H. Bartelt, A. Stock, G. Bauer, W. Schafer, H. Sickinge & J Schwide Abstract: Optical microsystems consist of micro-optical, integrated-optical, mechanical and packaging components. Due to the hybrid nature and the high complexity of these microsystems a general design strategy is ... Pages: 10 Size: 1,097 kb Paper DOI: 10.2495/MIC970171

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