Author(s): J.-P. Fibers, C. Glingener, E. Voges, P. Schreiber, C. Wachter,
W. Karthe, D. Krabe, R. Dumcke, H. Reichl, G. Hagner,
S. Schroter, H. Bartelt, A. Stock, G. Bauer, W. Schafer,
H. Sickinge & J Schwide
Optical microsystems consist of micro-optical, integrated-optical, mechanical and packaging
Due to the hybrid nature and the high complexity of these microsystems a
general design strategy is ...
Size: 1,097 kb
Paper DOI: 10.2495/MIC970171
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This paper can be found in the following bookSimulation and Design of Microsystems and Microstructures IIBuy