Author(s): H. Chein & M.-H. Chen
Semiconductor manufacturing industry has contributed significantly to economic
growth and become the most important industry in Taiwan.
However, the emission
of hazardous air pollutants (HAPs) produced by the industry is increasingly
deteriorating the ambient air quality.
A great amount of volatile organic compounds
(VOCs) could be produced and emitted with waste gases from semiconductor
manufacturing processes such as cleaning, etching, and photolithography.
of this study is to estimate the total VOCs emission from the semiconductor
industry based on the establishment of the emission factor which is defined as the
emission rate (kg/month) divided by the amount of chemical usage (L/month).
VOCs emission rate was measured by the continuous emission monitor...
Size: 979 kb
Paper DOI: 10.2495/AIR010481
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