• Home
• Register an Account
• New Title Information Alerts
• Contact Us
• Overview of the Wessex Institute of Technology

Adobe PDF Reader is required to view our papers:

Estimation of VOCs emission factor for semiconductor manufacturing processes

Author(s): H. Chein & M.-H. Chen Abstract: Semiconductor manufacturing industry has contributed significantly to economic growth and become the most important industry in Taiwan. However, the emission of hazardous air pollutants (HAPs) produced by the industry is increasingly deteriorating the ambient air quality. A great amount of volatile organic compounds (VOCs) could be produced and emitted with waste gases from semiconductor manufacturing processes such as cleaning, etching, and photolithography. The goal of this study is to estimate the total VOCs emission from the semiconductor industry based on the establishment of the emission factor which is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). The VOCs emission rate was measured by the continuous emission monitor... Pages: 10 Size: 979 kb Paper DOI: 10.2495/AIR010481

Download the Full Article Price: US$ 0.00 This article is part of the WIT OpenView scheme and you can download the full text Adobe PDF article for FREE by clicking the 'Openview' icon below. Send this page to a colleague. This paper can be found in the following book Air Pollution IX Buy Book from Witpress.com

---

Download the Full Article This article is part of the WIT OpenView scheme and you can download the full text Adobe PDF article for FREE by clicking the 'Openview' icon to the right.